Sensor AET 1Detects the change in resistance accompanying the gas detection reaction on thick-film semiconductor surfaces a few micrometers to tens of micrometers thick.


Detection Principle
Structure of sensing element

cos structure


Sensor Performance

cos performance



  • More sensitive than the semiconductor sensor.
  • Selective to gases(Cl2, H2S, EO, etc.)
  • Self-cleaning effect on the surface ensuring high repeatability and long-term stability due to high working temperature.