nf3Name

Nitrogen Trifluoride (NF3)

 

CAS nr.

7783-54-2

 

Measuring ranges

Standard range: 0 - 30 ppm

 

TLV level (TLV-TWA)

10 ppm

 

Relative density (compared to air):

2.45

 

Applications

  • Nitrogen trifluoride is used in the plasma etching of silicon wafers
  • Cleaning of the PECVD chambers in the production of LCD's (liquid-crystal displays) and silicon-based thin-film solar cells

 

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